Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant acceleromete...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-12-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/20/24/7207 |