Highly Sensitive Signal Processing Devices for Capacitive Transducers of Micromechanical Accelerometers
In this paper, the principles of the open-loop frequency-based signal processing devices for capacitive MEMS accelerometers are used to develop three CMOS IP-core (Intellectual Property core) projects of highly sensitive signal processing devices with frequency output. Signal processing devices desi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-08-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/8/9/932 |