Fabrication of Micro-Optics Elements with Arbitrary Surface Profiles Based on One-Step Maskless Grayscale Lithography

Fabrication of Micro-Optics Elements with Arbitrary Surface Profiles Based on One-Step Maskless Grayscale Lithography

A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose according to the surface profile of the structure to be f...

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Bibliographic Details
Main Authors: Qinyuan Deng, Yong Yang, Hongtao Gao, Yi Zhou, Yu He, Song Hu
Format: Article
Language:English
Published: MDPI AG 2017-10-01
Series:Micromachines
Subjects:
maskless lithography
micro-optics elements
arbitrary surface
exposure dose
nonlinear effect
Online Access:https://www.mdpi.com/2072-666X/8/10/314

Internet

https://www.mdpi.com/2072-666X/8/10/314

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