Modeling the Electrostatic Deflection of a MEMS Multilayers Based Actuator
An actuator comprised of a rigid substrate and two parallel clamped-clamped microbeams is modeled under the influence of electrostatic loading. The problem is considered under the context of nonlinear Euler's mechanics, where the actuating system is described by coupled integrodifferential equa...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2013-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2013/959232 |