MULTILAYER HARD COATINGS OF Cr/CrN OBTAINED USING UNBALANCED MAGNETRON SPUTTERING (UBM) AND DIFFERENT DEGREES OF UNBALANCE
Hard and tough coatings in the form of Cr/CrN bilayers were produced by reactive magnetron sputtering in Ar and Ar+N2 atmospheres respectively onto Si and Steel (H13) substrates. An unbalanced magnetron (GENCOA VT 100) and different Ar and N2 fluxes of 9 and 3 sccm respectively were used. The unbala...
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| Format: | Article |
| Language: | English |
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Universidad Nacional de Colombia
2011-07-01
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| Series: | Momento |
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| Online Access: | https://revistas.unal.edu.co/index.php/momento/article/view/34863 |