Grating couplers integrated on Mach-Zehnder interferometric biosensors operating in the visible range
We present the design, fabrication, and characterization of submicronic grating couplers integrated on Si<sub>3</sub>N<sub>4</sub> rib waveguide Mach-Zehnder interferometers (MZIs) for biosensing applications working in the visible spectral range for both TE and TM polarizati...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2013-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/6476622/ |