Grating couplers integrated on Mach-Zehnder interferometric biosensors operating in the visible range
We present the design, fabrication, and characterization of submicronic grating couplers integrated on Si<sub>3</sub>N<sub>4</sub> rib waveguide Mach-Zehnder interferometers (MZIs) for biosensing applications working in the visible spectral range for both TE and TM polarizati...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2013-01-01
|
Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/6476622/ |