Design and fabrication of a CMOS-compatible MHP gas sensor
A novel micro-hotplate (MHP) gas sensor is designed and fabricated with a standard CMOS technology followed by post-CMOS processes. The tungsten plugging between the first and the second metal layer in the CMOS processes is designed as zigzag resistor heaters embedded in the membrane. In the post-CM...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4869616 |