Silicon Based Coplanar Capacitive Device for Liquid Sensor Applications
The development of silicon-based sensor devices has enabled the possibility to pursue novel integrated smart sensor technologies. Under this scenario, capacitive sensor devices are one viable option for implementing different kinds of applications. In this paper, an interdigitated coplanar capacitiv...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-09-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/17/5958 |