Modeling of Kr-Xe discharge of excimer lamp
This paper reports the numerical simulation of Dielectric Barrier Discharge (DBD) for Kr-Xe excilamp. The model of the discharge consists of three main modules: a plasma chemistry module, a circuit module and a Boltzmann equation module. The results predict the optimal operating conditions and descr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2013-03-01
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| Series: | EPJ Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/epjconf/20134404004 |