Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstration...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2010-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/10/3/2348/ |