Displacement measuring interferometer for sub-nano meter resolution
In this presentation, the displacement measurement system using sinusoidal phase modulation interferometer and modified phase-locked loop is discussed. The modified phase-locked loop is specially developed phase-locked loop for sinusoidal phase modulation interferometer for improving the resolution....
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421002993 |