Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength

Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength

We report on a new optical sensing principle for measuring the electric field strength based on MEMS technology. This method allows for distortion-free and point-like measurements with high stability regarding temperature. The main focus of this paper rests on an enhanced measurement set-up and the...

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Bibliographic Details
Main Authors: Wilfried Hortschitz, Andreas Kainz, Harald Steiner, Gabor Kovacs, Michael Stifter, Matthias Kahr, Johannes Schalko, Franz Keplinger
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
electric field
electric field sensor
sensor
distortion-free
point-like
MEMS
MOEMS
Online Access:https://www.mdpi.com/2504-3900/2/13/855
Description
Summary:We report on a new optical sensing principle for measuring the electric field strength based on MEMS technology. This method allows for distortion-free and point-like measurements with high stability regarding temperature. The main focus of this paper rests on an enhanced measurement set-up and the thereby obtained measurement results. These results reveal an improved resolution limit and point to the limitations of the current characterization approach. A resolution limit of 222 V/m was achieved while a further improvement of roughly one order of magnitude is feasible.
ISSN:2504-3900

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