A Catalytic Sensor for Measurement of Radical Density in CO2 Plasmas
A catalytic sensor for the measurement of radical density in weakly ionized CO2 plasmas, created in a low-pressure electrodeless discharge, is presented. The CO2 plasma was created in a 4 cm wide borosilicate glass tube inside a copper coil connected to a radio frequency generator operating at 27.12...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2012-11-01
|
Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/12/12/16168 |