A Catalytic Sensor for Measurement of Radical Density in CO2 Plasmas

A catalytic sensor for the measurement of radical density in weakly ionized CO2 plasmas, created in a low-pressure electrodeless discharge, is presented. The CO2 plasma was created in a 4 cm wide borosilicate glass tube inside a copper coil connected to a radio frequency generator operating at 27.12...

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Bibliographic Details
Main Authors: Alenka Vesel, Rok Zaplotnik, Jonathan Iacono, Marianne Balat-Pichelin, Miran Mozetic
Format: Article
Language:English
Published: MDPI AG 2012-11-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/12/12/16168