Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters
Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO2/LiNbO3 layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the film thickness of SiO2, which pose crucial i...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/7/8/822 |