Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection

Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection

We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O<...

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Bibliographic Details
Main Authors: Elham Mafi, Nicholas Calvano, Jessica Patel, Md. Sherajul Islam, Md. Sakib Hasan Khan, Mukti Rana
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Micromachines
Subjects:
pyroelectric
thermal detector
infrared detector
polarization
lead titanate
PCT
Online Access:https://www.mdpi.com/2072-666X/11/12/1073

Internet

https://www.mdpi.com/2072-666X/11/12/1073

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