Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection
We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O<...
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doaj-1f4a7c935b734cc6b1faeb6c4a9ab5f42020-12-02T00:02:10ZengMDPI AGMicromachines2072-666X2020-12-01111073107310.3390/mi11121073Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric DetectionElham Mafi0Nicholas Calvano1Jessica Patel2Md. Sherajul Islam3Md. Sakib Hasan Khan4Mukti Rana5Division of Physics, Engineering, Mathematics and Computer Sciences, and Optical Science Center for Applied Research, Delaware State University, Dover, DE 19901, USADivision of Physics, Engineering, Mathematics and Computer Sciences, and Optical Science Center for Applied Research, Delaware State University, Dover, DE 19901, USADivision of Physics, Engineering, Mathematics and Computer Sciences, and Optical Science Center for Applied Research, Delaware State University, Dover, DE 19901, USADepartment of Electrical and Electronic Engineering, Khulna University of Engineering and Technology, Khulna 9203, BangladeshDepartment of Electrical and Electronic Engineering, Khulna University of Engineering and Technology, Khulna 9203, BangladeshDivision of Physics, Engineering, Mathematics and Computer Sciences, and Optical Science Center for Applied Research, Delaware State University, Dover, DE 19901, USAWe report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O<sub>2</sub> environment. Substrates were kept at variable temperatures during the deposition. The PCT films were annealed at various temperatures in an O<sub>2</sub> environment for 15 min. X-ray diffraction results confirm the polycrystalline nature of these films. Energy dispersive spectroscopy function of scanning electron microscope showed that the films are stoichiometric (Ca<sub>0.43</sub>Pb<sub>0.57</sub>) TiO<sub>3</sub> (Ca/Ti = 0.5, Pb/Ti = 0.66). Temperature dependence of capacitance, pyroelectric current, and pyroelectric coefficient was investigated for different PCT films. Our results show that films deposited at 550 °C and 600 °C demonstrate better quality and larger values of the pyroelectric coefficient. On the other hand, the capacitance fabricated on the PCT films at 550 °C showed the highest value of pyroelectric current and pyroelectric coefficient which were 14 pA and at 30 °C was ~2 µC/m<sup>2</sup>K respectively at a higher temperature. In addition, we used density functional theory to determine the atomic and band structure, real and imaginary parts of dielectric constant and refractive index, and absorption and reflection constants with energy.https://www.mdpi.com/2072-666X/11/12/1073pyroelectricthermal detectorinfrared detectorpolarizationlead titanatePCT |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Elham Mafi Nicholas Calvano Jessica Patel Md. Sherajul Islam Md. Sakib Hasan Khan Mukti Rana |
spellingShingle |
Elham Mafi Nicholas Calvano Jessica Patel Md. Sherajul Islam Md. Sakib Hasan Khan Mukti Rana Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection Micromachines pyroelectric thermal detector infrared detector polarization lead titanate PCT |
author_facet |
Elham Mafi Nicholas Calvano Jessica Patel Md. Sherajul Islam Md. Sakib Hasan Khan Mukti Rana |
author_sort |
Elham Mafi |
title |
Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection |
title_short |
Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection |
title_full |
Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection |
title_fullStr |
Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection |
title_full_unstemmed |
Electro-Optical Properties of Sputtered Calcium Lead Titanate Thin Films for Pyroelectric Detection |
title_sort |
electro-optical properties of sputtered calcium lead titanate thin films for pyroelectric detection |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2020-12-01 |
description |
We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O<sub>2</sub> environment. Substrates were kept at variable temperatures during the deposition. The PCT films were annealed at various temperatures in an O<sub>2</sub> environment for 15 min. X-ray diffraction results confirm the polycrystalline nature of these films. Energy dispersive spectroscopy function of scanning electron microscope showed that the films are stoichiometric (Ca<sub>0.43</sub>Pb<sub>0.57</sub>) TiO<sub>3</sub> (Ca/Ti = 0.5, Pb/Ti = 0.66). Temperature dependence of capacitance, pyroelectric current, and pyroelectric coefficient was investigated for different PCT films. Our results show that films deposited at 550 °C and 600 °C demonstrate better quality and larger values of the pyroelectric coefficient. On the other hand, the capacitance fabricated on the PCT films at 550 °C showed the highest value of pyroelectric current and pyroelectric coefficient which were 14 pA and at 30 °C was ~2 µC/m<sup>2</sup>K respectively at a higher temperature. In addition, we used density functional theory to determine the atomic and band structure, real and imaginary parts of dielectric constant and refractive index, and absorption and reflection constants with energy. |
topic |
pyroelectric thermal detector infrared detector polarization lead titanate PCT |
url |
https://www.mdpi.com/2072-666X/11/12/1073 |
work_keys_str_mv |
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