PERFORMANCE ANALYSIS OF MEMS MICROHEATER BYOPTIMIZING COIL DESIGN USING COVENTORWARE
Scaling in VLSI technology is being widely practiced in almost every chip design step. This approach of scaling down things has now found its way in the field of Sensors and actuators which lead to a new path of study viz MEMS (Micro-Electro Mechanical System). There are several studies published in...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Yeshwantrao Chavan College of Engineering, India
2016-07-01
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| Series: | Journal of Research in Engineering and Applied Sciences |
| Subjects: | |
| Online Access: | http://www.mgijournal.com/Data/Issues_AdminPdf/65/4-Volume%201%20Issue%203%20%20July%202016.pdf |