Nonlinear Vibration Analysis of Damaged Microplate considering Size Effect
Since microplates are extensively used in MEMS devices such as microbumps, micromirrors, and microphones, this work aims to study nonlinear vibration of an electrically actuated microplate whose four edges are clamped. Based on the modified couple stress theory (MCST) and strain equivalent assumptio...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2020-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2020/8897987 |