Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission ima...

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Bibliographic Details
Main Authors: Knut E. Aasmundtveit, Einar Halvorsen, Nils Hoivik, Tormod B. Haugen, Bao Q. Ta
Format: Article
Language:English
Published: MDPI AG 2013-07-01
Series:Materials
Subjects:
carbon nanotubes
defects
disorder
local synthesis
scanning transmission electron microscopy
Online Access:http://www.mdpi.com/1996-1944/6/8/3160

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http://www.mdpi.com/1996-1944/6/8/3160

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