Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission ima...

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Bibliographic Details
Main Authors: Knut E. Aasmundtveit, Einar Halvorsen, Nils Hoivik, Tormod B. Haugen, Bao Q. Ta
Format: Article
Language:English
Published: MDPI AG 2013-07-01
Series:Materials
Subjects:
carbon nanotubes
defects
disorder
local synthesis
scanning transmission electron microscopy
Online Access:http://www.mdpi.com/1996-1944/6/8/3160
Description
Summary:Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy—S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs: high temperature favors thin and regular structures, whereas low temperature favors “bamboo-like” structures.
ISSN:1996-1944

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