Effects of Annealing on Residual Stress in Ta2O5 Films Deposited by Dual Ion Beam Sputtering

Effects of Annealing on Residual Stress in Ta2O5 Films Deposited by Dual Ion Beam Sputtering

Optical coatings deposited by the dual ion beam sputtering (DIBS) method usually show high compressive stress, which results in severe wavefront deformation of optical elements. Annealing post-treatment has been widely used to control the residual stress of optical coatings. However, the effect of a...

Full description

Bibliographic Details
Main Authors: Qipeng Lv, Mingliang Huang, Shaoqian Zhang, Songwen Deng, Faquan Gong, Feng Wang, Yanwei Pan, Gang Li, Yuqi Jin
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Coatings
Subjects:
dual ion beam sputtering
residual stress
annealing treatment
Ta2O5 film
Online Access:http://www.mdpi.com/2079-6412/8/4/150

Internet

http://www.mdpi.com/2079-6412/8/4/150

Similar Items