Etching mechanisms, kinetics, and pattern formation in multilayered WSe2
Recently, multilayered WSe2 patterns consisting of a mixture of curved and linear edge segments and a mixture of cusps and apices have been obtained by combining chemical vapor deposition growth and etching. The underlying mechanisms and kinetics of the formation of such fascinating patterns, howeve...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-09-01
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| Series: | Materials Today Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590049820300229 |