Influence of Ni Catalyst Layer and TiN Diffusion Barrier on Carbon Nanotube Growth Rate

Influence of Ni Catalyst Layer and TiN Diffusion Barrier on Carbon Nanotube Growth Rate

<p>Abstract</p> <p>Dense, vertically aligned multiwall carbon nanotubes were synthesized on TiN electrode layers for infrared sensing applications. Microwave plasma-enhanced chemical vapor deposition and Ni catalyst were used for the nanotubes synthesis. The resultant nanotubes wer...

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Bibliographic Details
Main Authors: M&#233;rel Philippe, Laou Philips, Paradis Suzanne, D&#233;silets Sylvain, Liu Hao, Sun Xueliang, Kpetsu Jean-Baptiste, Jedrzejowski Pawel, C&#244;t&#233; Claude, Sarkissian Andranik
Format: Article
Language:English
Published: SpringerOpen 2010-01-01
Series:Nanoscale Research Letters
Subjects:
Carbon nanotubes
Plasma-enhanced chemical vapor deposition
Ni catalyst
TiN diffusion barrier
Scanning electron microscopy
Online Access:http://dx.doi.org/10.1007/s11671-010-9544-y

Internet

http://dx.doi.org/10.1007/s11671-010-9544-y

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