Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing

Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing

Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) require...

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Bibliographic Details
Main Authors: Avisek Roy, Mehdi Azadmehr, Bao Q. Ta, Philipp Häfliger, Knut E. Aasmundtveit
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Sensors
Subjects:
carbon nanotube
local cnt synthesis
cmos–cnt integration
microstructures
microheater
cmos-compatible temperature
Online Access:https://www.mdpi.com/1424-8220/19/19/4340

Internet

https://www.mdpi.com/1424-8220/19/19/4340

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