On the Small-Signal Capacitance of RF MEMS Switches at Very Low Frequencies
This paper presents on-wafer capacitance measurements of silicon-based RF MEMS capacitive switches down to frequencies below 1 Hz. The capacitance-voltage (C-V) curve measured at very-low frequency (0.01-10 Hz) deviates from the commonly measured and well-understood high-frequency C-V curve, especia...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7549009/ |