Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing
Abstract To address the resource-competing issue between high sensitivity and wide working range for a stand-alone sensor, development of capacitive sensors with an adjustable gap between two electrodes has been of growing interest. While several approaches have been developed to fabricate tunable c...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-10-01
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| Series: | npj Flexible Electronics |
| Online Access: | https://doi.org/10.1038/s41528-021-00125-9 |