Simultaneously controlling heat conduction and infrared absorption with a textured dielectric film to enhance the performance of thermopiles
Abstract The heat conduction and infrared absorption properties of the dielectric film have a great influence on the thermopile performance. Thinning the dielectric film, reducing its contact area with the silicon substrate, or adding high-absorptivity nanomaterials has been proven to be effective i...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-021-00264-z |