Quadrilateral Micro-Hole Array Machining on Invar Thin Film: Wet Etching and Electrochemical Fusion Machining

Quadrilateral Micro-Hole Array Machining on Invar Thin Film: Wet Etching and Electrochemical Fusion Machining

Ultra-precision products which contain a micro-hole array have recently shown remarkable demand growth in many fields, especially in the semiconductor and display industries. Photoresist etching and electrochemical machining are widely known as precision methods for machining micro-holes with no res...

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Bibliographic Details
Main Authors: Woong-Kirl Choi, Seong-Hyun Kim, Seung-Geon Choi, Eun-Sang Lee
Format: Article
Language:English
Published: MDPI AG 2018-01-01
Series:Materials
Subjects:
wet etching
electrochemical machining
fusion machining
Invar film
micro-hole array
Online Access:http://www.mdpi.com/1996-1944/11/1/160

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http://www.mdpi.com/1996-1944/11/1/160

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