Electrical Characteristics of Nanoelectromechanical Relay with Multi-Domain HfO<sub>2</sub>-Based Ferroelectric Materials
Since the discovery of ferroelectricity in HfO<sub>2</sub>-based materials which are comparable to the complementary metal-oxide–semiconductor (CMOS) fabrication process—a negative capacitance effect in the HfO<sub>2</sub>-based materials has been actively studied. Owing to n...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-07-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/9/8/1208 |