Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography

Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography

We used inclined lithography to fabricate a pneumatic microvalve for tall microchannels such as those used to convey large cells. The pneumatic microvalve consists of three layers. The upper layer is the actual liquid microchannel, which has a parallelogram-shaped cross section of width 500 μm, heig...

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Bibliographic Details
Main Authors: Maho Kaminaga, Tadashi Ishida, Toru Omata
Format: Article
Language:English
Published: MDPI AG 2016-12-01
Series:Micromachines
Subjects:
microfluidic device
pneumatic microvalve
inclined lithography
cell
Online Access:http://www.mdpi.com/2072-666X/7/12/224

Internet

http://www.mdpi.com/2072-666X/7/12/224

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