MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure

MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure

We demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further used in the investigated system. In addition, the exe...

Full description

Bibliographic Details
Main Authors: Ivan Ryger, Alexandra Artusio-Glimpse, Paul Williams, Gordon Shaw, Matthew Simons, Christopher Holloway, John Lehman
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
radiation pressure
capacitive sensor
lock-in amplifier
silicon micromachining
acoustic noise suppression
tilt immunity
distributed bragg reflector
Archimedian spiral spring
Online Access:http://www.mdpi.com/2504-3900/2/13/767

Internet

http://www.mdpi.com/2504-3900/2/13/767

Similar Items