An Amorphous (Al<sub>0.12</sub>Ga<sub>0.88</sub>)<sub>2</sub>O<sub>3</sub> Deep Ultraviolet Photodetector

An Amorphous (Al<sub>0.12</sub>Ga<sub>0.88</sub>)<sub>2</sub>O<sub>3</sub> Deep Ultraviolet Photodetector

The authors report the deposition of an (Al<sub>x</sub>Ga<sub>1-x</sub>)<sub>2</sub>O<sub>3</sub> amorphous thin film on sapphire substrates by sputter deposition. An amorphous deep ultraviolet (UV) (Al<sub>0.12</sub>Ga<sub>0.88</s...

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Bibliographic Details
Main Authors: Shu-Bai Liu, Shoou-Jinn Chang, Sheng-Po Chang, Chia-Hsun Chen
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Photonics Journal
Subjects:
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wide-bandgap material
deep UV photodetector
amorphous
Online Access:https://ieeexplore.ieee.org/document/9115846/

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https://ieeexplore.ieee.org/document/9115846/

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