Magnetic degradation of thin film multilayers during ion milling
We present a study of Ar ion milling-induced damage in exchange biased IrMn/CoFe/Ag-based magnetic multilayer thin films. While process variations determine the change in CoFe magnetic properties, the distance from the ion milling front to the IrMn/CoFe interface dominates the extent of exchange bia...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-04-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4870802 |