3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches
In this paper, we report the finite element method (FEM) simulation of double-clamped graphene nanoelectromechanical (NEM) switches. Pull-in and pull-out characteristics are analyzed for graphene NEM switches with different dimensions and these are consistent with the experimental results. This nume...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-08-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/7/8/143 |