Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineering
Extreme cooling rates during physical vapor deposition (PVD) allow growth of metastable phases. However, we propose that reactive PVD processes can be described by a gas–solid paraequilibrium defining chemical composition and thus point defect concentration. We show that this notion allows for point...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2017-05-01
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| Series: | Materials Research Letters |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/21663831.2016.1233914 |