A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering
A 3 Degree-of-Freedom (DOF) MEMS mirror is presented which can direct the light beam on an objective point and also operate in a continuous resonance 2 DOF mode. The micro-mirror is actuated by Lorentz force and has 4 actuators embedded in 4 sides of a square mirror. By enabling the actuators, diffe...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-12-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/938 |