Identifikasi Gugus SiHx (x=1, 2 dan 3) pada Silikon Berpori dari Substrat Si (111) Tipe-P
The study of identification of functional group SiHx (x=1, 2, 3) to typep Si (111) made by anodizatied silicon wafer in 0,3 ohm-cm hydrofluoric (HF) has been conducted. The objective of the research is to determine the effects of HF concentrations and anodization time on PS functional groups. HF con...
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| Format: | Article |
| Language: | English |
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Lambung Mangkurat University Press
2017-03-01
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| Series: | Jurnal Fisika Flux |
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| Online Access: | http://ppjp.unlam.ac.id/journal/index.php/f/article/view/3084 |