Optically processed microlens array for single-beam lithography of plasmonic structures
A 2D dielectric grating produced by photolithography was employed as a microlens array (MLA), which was based on a smooth surface and a shape that may be defined roughly as a hemisphere of each lattice. Such a 2D MLA can focus an incident ultraviolet light beam into a matrix of light spots, which we...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2018-09-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2018-0091 |