Production of clusters and thin films of nitrides, oxides and carbides by pulsed laser ablation and deposition
A short introduction on the principles of laser-matter interaction, material evaporation, plume formation, its reactivity with suitable gases and finally deposition are here illustrated. Experiments by mass spectrometry of formation of clusters, precursors of thin films and nanoparticles of oxides,...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2004-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/S1110662X04000042 |