A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature

A ppm Ethanol Sensor Based on Fabry–Perot Interferometric Surface Stress Transducer at Room Temperature

Disease screening by exhaled breath diagnosis is less burdensome for patients, and various devices have been developed as promising diagnostic methods. We developed a microelectromechanical system (MEMS) optical interferometric surface stress sensor to detect volatile ethanol gas at room temperature...

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Bibliographic Details
Main Authors: Toshiaki Takahashi, Yong-Joon Choi, Kazuaki Sawada, Kazuhiro Takahashi
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Sensors
Subjects:
fabry–perot interference
microelectromechanical systems
surface stress sensor
optical interferometry
film transfer technique
volatile organic compounds
Online Access:https://www.mdpi.com/1424-8220/20/23/6868

Internet

https://www.mdpi.com/1424-8220/20/23/6868

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