Characterization of duplex hard coatings with additional ion implantation
In this paper, we present the results of a study of TiN thin fi lms which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N<sup>+2</sup> ions. The ion implantation...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Croatian Metallurgical Society
2012-01-01
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| Series: | Metalurgija |
| Subjects: | |
| Online Access: | http://hrcak.srce.hr/file/105957 |