Hierarchical Aggregation/Disaggregation for Adaptive Abstraction-Level Conversion in Digital Twin-Based Smart Semiconductor Manufacturing
In smart manufacturing, engineers typically analyze unexpected real-time problems using digitally cloned discrete-event (DE) models for wafer fabrication. To achieve a faster response to problems, it is essential to increase the speed of DE simulations because making optimal decisions for addressing...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9405655/ |