Experimental Study on Variation of Surface Roughness and Q Factors of Fused Silica Cylindrical Resonators with Different Grinding Speeds

Experimental Study on Variation of Surface Roughness and Q Factors of Fused Silica Cylindrical Resonators with Different Grinding Speeds

For the axisymmetric shell resonator gyroscopes, the quality factor (Q factor) of the resonator is one of the core parameters limiting their performances. Surface loss is one of the dominating losses, which is related to the subsurface damage (SSD) that is influenced by the grinding parameters. This...

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Bibliographic Details
Main Authors: Libin Zeng, Yunfeng Tao, Yao Pan, Jianping Liu, Kaiyong Yang, Hui Luo
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Micromachines
Subjects:
quality factor
resonator
subsurface damage
surface roughness
Online Access:https://www.mdpi.com/2072-666X/12/9/1052

Internet

https://www.mdpi.com/2072-666X/12/9/1052

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