Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2019-10-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-019-12796-0 |