Research overview of anti-high overload MEMS gyroscope

Research overview of anti-high overload MEMS gyroscope

Inertial guidance system plays a very important role in guided artillery. Micro electro mechanical system (MEMS) gyroscope, as the core component of inertial guidance system, has high resistance to overload and restricts the application of inertial guidance system in high overload environment direct...

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Bibliographic Details
Main Authors: Huiliang CAO, Yingjie ZHANG, Zhiwei KOU, Yunbo SHI, Jun TANG, Jun LIU
Format: Article
Language:zho
Published: Hebei University of Science and Technology 2018-08-01
Series:Journal of Hebei University of Science and Technology
Subjects:
sensor technology
high overload
MEMS gyroscope
comb capacitance
four antinodes vibration
silicon material
Online Access:http://xuebao.hebust.edu.cn/hbkjdx/ch/reader/create_pdf.aspx?file_no=b201804001&flag=1&journal_

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