Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method
Sulfur-doped diamond-like carbon films (S-DLC) fabricated from C2H2 and SF6 mixtures were used to study the effects of sulfur content and negative pulse bias voltage on the deposition and tribological properties of films prepared by plasma-based ion implantation (PBII). The structure and relative co...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2010-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2010/958581 |