Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning
Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account to develo...
Main Authors: | Michael Haub, Martin Bogner, Thomas Guenther, André Zimmermann, Hermann Sandmaier |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/21/11/3795 |
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