Incipient low-temperature formation of MAX phase in Cr–Al–C films

Incipient low-temperature formation of MAX phase in Cr–Al–C films

Abstract Ceramic-metallic MAX phase of chromium aluminium carbide ternary compounds was successfully obtained through deposition by DC sputtering onto Si substrates. A study of the influence of substrate temperature and in-air post-annealing on the film crystallinity and oxidation was undertaken. Sc...

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Bibliographic Details
Main Authors: O. Crisan, A. D. Crisan
Format: Article
Language:English
Published: SpringerOpen 2018-03-01
Series:Journal of Advanced Ceramics
Subjects:
ternary carbides
DC sputtering
annealing
crystallization
X-ray diffraction (XRD)
wavelength-dispersive X-ray analysis (WDSX)
Online Access:http://link.springer.com/article/10.1007/s40145-018-0265-5

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http://link.springer.com/article/10.1007/s40145-018-0265-5

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