Incipient low-temperature formation of MAX phase in Cr–Al–C films
Abstract Ceramic-metallic MAX phase of chromium aluminium carbide ternary compounds was successfully obtained through deposition by DC sputtering onto Si substrates. A study of the influence of substrate temperature and in-air post-annealing on the film crystallinity and oxidation was undertaken. Sc...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2018-03-01
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| Series: | Journal of Advanced Ceramics |
| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1007/s40145-018-0265-5 |