Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct
We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100 μ W RMS of (root-mean-square) output electric power under 0.03 G RMS (G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SO...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/8/10/293 |